Referenced Items are not available for this document.
This paper reports two multitransducer vacuum-sealed capacitive barometric pressure sensors, one using single-lead and the other using multiple-leads to transfer the electrical signal out of the vacuum-sealed reference cavity. The first device operates with a resolution of 37 mtorr over a pressure range from 600 to 800 torr. The sensitivity is 27 fF/torr (3000 ppm/torr). The TCO at 750 torr is 3900 ppm/°C and the TCS is 1000 ppm/°C. The second device has a resolution of 25 mtorr over a range from 500 to 800 torr, with individual transducer sensitivity of 39 fF/torr. The TCO at 750 torr is 1350 ppm/°C and TCS is 1000 ppm/°C. Both devices have an on-chip compensation capacitor and are read out using an electronically-trimmed switched-capacitor charge integrator
Published in:
Microelectromechanical Systems, Journal of
(Volume:10
,
Issue:
4
)
Date of Publication: Dec 2001
- Page(s):
- 580 - 588
- ISSN :
- 1057-7157
- INSPEC Accession Number:
- 7126714
- Digital Object Identifier :
- 10.1109/84.967381
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 August 2002
- Issue Date :
- Dec 2001
- Sponsored by :
- IEEE Electron Devices Society
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