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An angle-based design approach for rectangular electrostatic torsion actuators

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4 Author(s)
Zhixiong Xiao ; Microelectron. Res. Center, New Jersey Inst. of Technol., Newark, NJ, USA ; Wu, X.-T. ; Peng, W. ; Farmer, K.R.

In this paper, we develop a fast, angle-based design approach for rectangular electrostatic torsion actuators based on several simple equations. This approach is significantly more straightforward than the usual full calculation or simulation methods. The main results of the simplified approach are verified by comparing them with analytical calculations and MEMCAD simulations with fractional difference smaller than 3% for torsion mode dominant actuators. Also, good agreement is found by comparison with the measured behavior of a microfabricated full-plate device

Published in:

Microelectromechanical Systems, Journal of  (Volume:10 ,  Issue: 4 )

Date of Publication:

Dec 2001

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