Cart (Loading....) | Create Account
Close category search window
 

An angle-based design approach for rectangular electrostatic torsion actuators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Zhixiong Xiao ; Microelectron. Res. Center, New Jersey Inst. of Technol., Newark, NJ, USA ; Wu, X.-T. ; Peng, W. ; Farmer, K.R.

In this paper, we develop a fast, angle-based design approach for rectangular electrostatic torsion actuators based on several simple equations. This approach is significantly more straightforward than the usual full calculation or simulation methods. The main results of the simplified approach are verified by comparing them with analytical calculations and MEMCAD simulations with fractional difference smaller than 3% for torsion mode dominant actuators. Also, good agreement is found by comparison with the measured behavior of a microfabricated full-plate device

Published in:

Microelectromechanical Systems, Journal of  (Volume:10 ,  Issue: 4 )

Date of Publication:

Dec 2001

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.