Referenced Items are not available for this document.
The first study on an entirely surface-micromachined resonant-beam pressure sensor is presented. Using a fully surface-micromachined process, an encapsulated beam resonant pressure-sensor structure with a pressure-sensitive diaphragm of 100×150×2 μm has been fabricated. The resonating beam is fully enclosed inside the reference vacuum cavity formed beneath the diaphragm. The new design enables high pressure sensitivity and a miniature chip size, essential for sensors such as catheter-mounted intravascular blood pressure sensors. The pressure sensitivity is measured at 3.2%/bar with a beam resonance frequency of about 700 kHz
Published in:
Microelectromechanical Systems, Journal of
(Volume:10
,
Issue:
4
)
Date of Publication: Dec 2001
- Page(s):
- 498 - 502
- ISSN :
- 1057-7157
- INSPEC Accession Number:
- 7126704
- Digital Object Identifier :
- 10.1109/84.967371
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 August 2002
- Issue Date :
- Dec 2001
- Sponsored by :
- IEEE Electron Devices Society
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
