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A surface-micromachined resonant-beam pressure-sensing structure

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3 Author(s)
P. Melvas ; Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden ; E. Kalvesten ; G. Stemme

The first study on an entirely surface-micromachined resonant-beam pressure sensor is presented. Using a fully surface-micromachined process, an encapsulated beam resonant pressure-sensor structure with a pressure-sensitive diaphragm of 100×150×2 μm has been fabricated. The resonating beam is fully enclosed inside the reference vacuum cavity formed beneath the diaphragm. The new design enables high pressure sensitivity and a miniature chip size, essential for sensors such as catheter-mounted intravascular blood pressure sensors. The pressure sensitivity is measured at 3.2%/bar with a beam resonance frequency of about 700 kHz

Published in:

Journal of Microelectromechanical Systems  (Volume:10 ,  Issue: 4 )