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Three-dimensional nanoassembly of multi-walled carbon nanotubes through nanorobotic manipulations by using electron-beam-induced deposition

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3 Author(s)
Lixin Dong ; Dept. of Micro Syst. Eng., Nagoya Univ., Japan ; Arai, F. ; Fukuda, T.

Nanoassembly of multi-walled carbon nanotubes (MWNTs) in three-dimensional space by using electron-beam-induced deposition (EBID) is realized through nanorobotic manipulations. Concept of parallel EBID is presented and feasibility of using MWNTs as electron-beam emitters for EBID is investigated. A selection method of carbon nanotubes (CNTs) from raw materials according to their mechanical properties is presented, which is realized through buckling a nanotube with nanorobotic manipulators. Destructive construction of CNT-based nano building blocks is also demonstrated by extracting an inner layer from outer layer of a multi-walled carbon nanotubes, which is potentially a nanometer scale bearing. MWNT-junctions are constructed with EBID through nanorobotic manipulations

Published in:

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

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