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Passive and active probe arrays for dip-pen nanolithography

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4 Author(s)
Ming Zhang ; Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL ; Bullen, D. ; Ryu, K.S. ; Chang Liu

The development of passive and active atomic force microscope (AFM) probe arrays is reported in this paper. The devices are specifically designed to work with Dip-Pen Nanolithography and are fabricated using MEMS micromachining techniques. These devices can generate sub-100 nm patterns in a high speed, parallel, and controllable fashion

Published in:

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Date of Conference:

2001