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Comparative analysis of 300 mm FAB architectures impact of equipment sets on wafer cost and dynamic performance

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6 Author(s)
R. Bachrach ; Appl. Mater. Inc., Santa Clara, CA, USA ; M. Pool ; K. Genovese ; J. C. Moran
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A semiconductor fabricator is a highly complex system that hosts the process tools capable of manufacturing IC product devices based upon their process flows. A typical process flow for a 0.15 μm logic process consists of 300 to 400 steps with 22 to 24 mask steps. A variety of equipment sets and organizational architectures are possible for any process flow. The results of a comparative analysis of two such 300 mm FAB architectures are presented in this report. The impact of equipment sets on fab Sizing, Cost, and Performance are described as a function of operating characteristics

Published in:

Semiconductor Manufacturing Symposium, 2001 IEEE International

Date of Conference:

2001