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Using real time dispatcher as a decision-making support system to resolve overlapping dispatching problem in FAB manufacturing

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4 Author(s)
Ying-Jen Chen ; MACRONIX Int. Co. Ltd., Hsinchu, Taiwan ; Kuo-Sung Huang ; Will Chen ; Yu-Ja Hsu

This paper describes a DSS (decision-making support system) for solving tool overlapping problems by using a real time dispatching system developed in MXIC FAB I. The problem issue and the system are first presented, followed by the description of the algorithm for solving tool overlapping. We found that operators can obtain the tool arrangement information very quickly through this DSS. With its precise forecast of coming WIP and calculation, our algorithm increases tool utilization by 10~13% as well as delivering a short cycle time for BTO (build-to-order) products

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Semiconductor Manufacturing Symposium, 2001 IEEE International

Date of Conference: