By Topic

Optimization and economic analysis for tool portfolio planning in semiconductor manufacturing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
C. -S. Wu ; Nat. Taiwan Univ., Taipei, Taiwan ; Y. -C. Chou ; J. -Z. Lin

The tool portfolio of a plant refers to the makeup, in quantity and type, of processing machines in the plant. Portfolio planning is a multi-criteria decision-making task involving trade-offs between investment cost, throughput, cycle time and risk. In this paper, an economic decision model is first presented for optimal configuration of portfolio and to determine optimal factory loading. If plants are closely located or have a twin-fab design, portfolio planning at multiple plants can be integrated to enhance the overall effectiveness of portfolios. A novel methodology for arbitrating capacity backup between multiple plants is described in the second part. Finally, robust configuration of portfolio in a dynamic demand environment is addressed. Industry data have been utilized to run through the developed methodologies

Published in:

Semiconductor Manufacturing Symposium, 2001 IEEE International

Date of Conference:

2001