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Accurate and robust noise-based trigger algorithm for soft breakdown detection in ultrathin gate dielectrics

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5 Author(s)

Oxide breakdown is one of the most threatening failure mechanisms in integrated circuits. As the oxide thickness is decreased in the sub-5-nm range, the breakdown definition, itself is no longer clear and its detection becomes problematic. A new algorithm for accurate and robust automatic triggering on soft breakdown (SBD) during constant voltage stress based on gate current noise increase is presented. Triggering on current spikes or pre-BD events is avoided. This test assures correct automatic SBD detection in a wide range of stress conditions and various geometries, with an execution speed that provides acceptable time resolution

Published in:

Device and Materials Reliability, IEEE Transactions on  (Volume:1 ,  Issue: 2 )

Date of Publication:

Jun 2001

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