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Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process of two or above steps

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9 Author(s)
Nagaura, Y. ; Nagaura Lab. Inc., Fukuoka, Japan ; Nagaura, Z. ; Nagaura, K. ; Nagato, K.
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Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape are successfully manufactured by chemical etching processes

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Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International

Date of Conference: