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Fabrication of high frequency DC-DC converter using Ti/FeTaN film inductor

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5 Author(s)
Choong-Sik Kim ; Dept. of Metall. & Mater. Sci., Hong-Ik Univ., Seoul, South Korea ; Seok Bae ; Hee-Jun Kim ; Seoung-Eui Nam
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We fabricated a planar-type film inductor with good high frequency characteristics using a FeTaN soft magnetic film. While FeTaN films inherently show good soft magnetic properties and high saturation magnetization, addition of Ti underlayer with a combination of magnetic field annealing leads to an increase of anisotropy field (Hk), thus improving high frequency characteristics. Planar-type spiral inductors using Ti/FeTaN films exhibit an inductance of ~1 μH, resistance of ~2 ohm, and Q factor of 2.3 at 2 MHz. We also fabricated a hybrid ZVS-CV buck converter using the film inductor. The converter shows about 80% of the conversion efficiency at 1.2 MHz, which withstands a load current up to 300 mA

Published in:

IEEE Transactions on Magnetics  (Volume:37 ,  Issue: 4 )