Fabrication of thick film magnetic cores for high frequency using LIGA process

Fabrication of magnetic cores with narrow slits which have low eddy current loss for high frequency has been investigated. The magnetic cores with narrow slits of 1.5 /spl mu/m to 5 /spl mu/m in width were fabricated by the LIGA process which is composed of deep X-ray lithography using synchrotron radiation (SR) and Ni electroforming. Magnetic hysteresis loops and permeability of the magnetic cores with various slit widths and distances between slits were measured.