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Fabrication of thick film magnetic cores for high frequency using LIGA process

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6 Author(s)
Takimoto, S. ; Fac. of Sci. & Eng., Ritsumeikan Univ., Kyoto, Japan ; Ueno, H. ; Sugiyama, S. ; Yamaguchi, M.
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Fabrication of magnetic cores with narrow slits which have low eddy current loss for high frequency has been investigated. The magnetic cores with narrow slits of 1.5 μm to 5 μm in width were fabricated by the LIGA process which is composed of deep X-ray lithography using synchrotron radiation (SR) and Ni electroforming. Magnetic hysteresis loops and permeability of the magnetic cores with various slit widths and distances between slits were measured

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Magnetics, IEEE Transactions on  (Volume:37 ,  Issue: 4 )