Thin films with barium hexaferrite (BaM) layers on thermally oxidized silicon wafers were fabricated by water-based sol-gel method. Polycrystalline BaFe12O19/SiO2/Si(100) thin films were characterized with Rutherford backscattering, X-ray diffraction, vibrating sample magnetometer, and atomic force microscope as well as Fourier transform infrared spectroscopy (FT-IR). The thin films were annealed at 600-900°C in air for 2 hours. The pattern for the sample annealed at a temperature above 650°C indexed well on the M-type hexagonal structure and no other phases were detectable. The films were composed of uniformly distributed hexagonal-type grains, with diameters between 400 and 600 Å. Surface roughness of the films was between 20 and 40 Å. The perpendicular coercivity HC⊥ and in-plane one HC|| were 4766 Oe and 4380 Oe, respectively, at room temperature under an applied field of 10 kOe annealed at 650°C for 2 hours
Published in:
Magnetics, IEEE Transactions on
(Volume:37
,
Issue:
4
)
Date of Publication: Jul 2001