By Topic

Properties of tetrahedral amorphous carbon film by filtered cathodic arc deposition for disk overcoat

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Hyodo, H. ; Lab. of Magnetic Recording Technol., Fujitsu Labs. Ltd., Atsugi, Japan ; Yamamoto, T. ; Toyoguchi, T.

Properties of an amorphous carbon film by filtered cathodic arc (FCA) deposition were studied. It was found that the properties of the film hardly changed by deposition conditions and that nitrogen doping into the film was effective for controlling the film properties. The amount of the sp3 bonding in the film was decreased with nitrogen content, thus the hardness also decreased. The adhesion of lubricant to the carbon film was improved by nitrogen doping. The films by FCA deposition have high durability and can be expected as ultra thin disk overcoat for the next generation

Published in:

Magnetics, IEEE Transactions on  (Volume:37 ,  Issue: 4 )