By Topic

A high-stiffness axial resonant probe for atomic force microscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
J. A. Harley ; Agilent Labs., Palo Alto, CA, USA ; T. W. Kenny

A high-stiffness, (>500 N/m) resonant atomic force microscope probe was constructed to allow force measurements in the presence of large force gradients. The probe employs a piezoresistively detected, electrostatically driven resonant beam sensor oriented perpendicularly to the sample surface. This probe is distinguished from shear force microscopy and noncontact atomic force microscopy in that the design allows for a stationary probe tip for improved spatial resolution and measures forces rather than force gradients. Measured results show a force resolution of 9 nN in a 1-kHz bandwidth in air with an oscillation amplitude of 36 nm and a resonance quality of 20. In a 1-mtorr vacuum the force resolution in the same bandwidth improves to 200 pN with a resonance quality of 450 and oscillation amplitude of 53 nm. This resolution is limited by white noise of the piezoresistor, and scales as expected with amplitude and resonance quality

Published in:

Journal of Microelectromechanical Systems  (Volume:10 ,  Issue: 3 )