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Comparison of capacitive and feedback-interferometric measurements on MEMS

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3 Author(s)
V. Annovazzi-Lodi ; Dipartimento di Elettronica, Pavia Univ., Italy ; S. Merlo ; M. Norgia

In this paper, we consider a typical microelectromechanical structure consisting of a small mass suspended by four laminar springs, which can be forced to vibrate by electrical actuation, and represents the basic block of many accelerometers, gyros and resonators. Measurements of parameters, such as the actuation efficiency, the resonance frequency and the quality factor, have been performed for such devices by feedback interferometry, and the results are compared with data obtained by the standard capacitive method

Published in:

Journal of Microelectromechanical Systems  (Volume:10 ,  Issue: 3 )