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Preparation and properties of Bi-system perovskite oxide thin films by sputtering method

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2 Author(s)
Watanabe, M. ; Sch. of Sci. & Eng., Waseda Univ., Tokyo, Japan ; Ichinose, Noboru

Ferroelectric (Bi0.5Na0.5)TiO3 thin films were synthesized on various kinds of substrates such as MgO(100), glass and Pt/MgO(100) by the rf-magnetron sputtering technique. Single perovskite thin films were prepared on MgO(100) and Pt/MgO(100). The films deposited on MgO(100) and Pt/MgO(100) substrates showed an a-axis orientation. The film obtained on Pt/MgO(100) at a substrate temperature of 500°C, using a (Bi0.50Na0.75)TiO3 powder target had P r of 2.3 μC/cm2 and Ec of 20 kV/cm. The hysteresis loop of the film did not change up to 3 × 106 switching cycles

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Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on  (Volume:2 )

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