Preparation and properties of Bi-system perovskite oxide thin films by sputtering method

Ferroelectric (Bi/sub 0.5/Na/sub 0.5/)TiO/sub 3/ thin films were synthesized on various kinds of substrates such as MgO[100], glass and Pt/MgO[100] by the rf-magnetron sputtering technique. Single perovskite thin films were prepared on MgO[100] and Pt/MgO[100]. The films deposited on MgO[100] and Pt/MgO[100] substrates showed an a-axis orientation. The film obtained on Pt/MgO[100] at a substrate temperature of 500/spl deg/C, using a (Bi/sub 0.50/Na/sub 0.75/)TiO/sub 3/ powder target had P/sub r/ of 2.3 /spl mu/C/cm/sup 2/ and E/sub c/ of 20 kV/cm. The hysteresis loop of the film did not change up to 3 /spl times/ 10/sup 6/ switching cycles.