By Topic

Chopperless-operated dielectric bolometer mode of infrared image sensor with ferroelectric BST film using improved operation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
M. Noda ; Osaka Prefecture Super-Eye-Image-Sensor (SEIS) Project, Japan ; K. Inoue ; H. Zhu ; H. Xu
more authors

Proposes a new type of simple detector pixel circuit and device structure for application of dielectric bolometer mode (DB) of IR image sensor, which has merits in uncooled operation, chopperless operation, low power dissipation, and high-sensitivity. We have successfully developed techniques of supply-voltage to the detector and a stable Ba 1-xSrxTiO3 (BST) thin film with large temperature coefficient of dielectric constant (TCD) as an IR detecting material, in order to stabilize the output level and improve the IR sensitivity. Also, a stress-balanced membrane for thermally isolated structure as an IR detector and resultant sensor arrays monolithically integrated with Si readout were developed. As a result, the stabilities in both TCD and output level have significantly improved and enabled us to obtain a fairly large IR detectivity, where best Rv and D* were about 1.2 kV/W and 2.9 × 108 cmHz 1/2/W, respectively

Published in:

Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on  (Volume:2 )

Date of Conference: