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Silicon doped diamond-like carbon films as a coating for improvement of electron field emission

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6 Author(s)

In this work the influence of in-situ silicon doping of PECVD DLC films on their properties and emission parameters of silicon tip array coated such films have been investigated. The idea was to make easier the electron transport from silicon tip through DLC film and enhance the field emission efficiency from silicon tips coated silicon doped DLC films

Published in:

Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International

Date of Conference:

2001