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Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO

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16 Author(s)
Jae-Hee Han ; Center for Nanotubes & Nanostructured Composite, Sung Kyun Kwan Univ., Suwon, South Korea ; Choi, Sun Hong ; Tae Yong Lee ; Yoo, Ji-Beom
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Vertically aligned carbon nanotube's (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH3 as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (Eto) of 1.75 V/μm while CNT grown on invar under the same condition showed larger Eto. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs

Published in:

Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International

Date of Conference:

2001