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Emission site control in carbon nanotube field emitters by focused ion beam irradiation

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5 Author(s)
Sawada, A. ; Res. Center for Mater. Sci. at Extreme Conditions, Osaka Univ., Japan ; Iriguchi, M. ; Zhao, W.J. ; Ochiai, C.
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Effect of ion irradiation on emission behavior in CNT (carbon nano tube) emitters has been investigated using focused ion beams (FIBs). The improvement in emission behavior with a drastic reduction in turn-on voltage and increase in emission current was found after FIB irradiation in CNT emitters

Published in:

Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International

Date of Conference:

2001