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Field emission vacuum power switch using vertically aligned carbon nanotubes

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4 Author(s)
Rupesinghe, N.L. ; Dept. of Eng., Cambridge Univ., UK ; Chhowalla, M. ; Teo, K.B.K. ; Amaratunga, G.A.J.

A field emission vacuum switch using vertically aligned carbon nanotubes (VACNT) grown by a direct current plasma enhanced chemical vapour deposition (DC PECVD) is reported. Cathodes with optimised field emission properties were evaluated in a diode configuration as a test vehicle for the construction of a vacuum power three terminal triode

Published in:

Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International

Date of Conference: