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Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

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2 Author(s)
Rostami, S. ; Dept. of Electr. & Comput. Eng., British Columbia Univ., Vancouver, BC, Canada ; Hamidzadeh, B.

This paper discusses two scheduling techniques for dual-arm cluster tools that address both process module and transport-module residency constraints and throughput requirements. The first technique is an extension of our previous work (2000) that only addressed process-module residency constraints. For cases with long process times, this technique can take a long time to find the solution and is not practical. Hence, we use this algorithm mainly as a benchmark for comparison. The second technique that uses a linear programming method with several heuristics can find the optimal solution very efficiently. An analytical and experimental analysis of this technique shows the correctness, completeness and efficiency of this technique.

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Robotics and Automation, 2001. Proceedings 2001 ICRA. IEEE International Conference on  (Volume:4 )

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