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Advanced sensors and actuators and their incorporation into micro electromechanical systems

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1 Author(s)
J. Nosek ; Dept. of Electr. & Electromech. Syst., Tech. Univ. Liberec, Czech Republic

The paper deals with material properties of piezoelectric relaxer based single crystals 0.91Pb(Zn1/3Nb2/3)-0.09PbTiO 3 (PZN-PT), which are important for application in actuators and sensors. The electromechanical coupling coefficient k33, elastic coefficient s33D and piezoelectric coefficient d33 are determined using dynamic (resonant) and static methods of measurement. Strain vs. electric field characteristic with low hysteresis was observed for this single crystal. Design of an actuator of small displacements is presented. The integration possibilities of electromechanical elements into a high degree integration density (VLSI) circuits and creation of the micro-electromechanical systems (MEMS) are mentioned. The VLSI circuits are designed as digital ASIC circuits using CADENCE software

Published in:

Industrial Electronics, 2000. ISIE 2000. Proceedings of the 2000 IEEE International Symposium on  (Volume:2 )

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