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Hybrid opto-mechanical gyroscope with injection-interferometer readout

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2 Author(s)
Norgia, M. ; Dipartimento di Elettronica, Pavia Univ., Italy ; Donati, S.

A hybrid micromachined-optoelectronic mechanical system (MOEMS) gyroscope is proposed. It consists of an electrically excited micro-mechanical resonator and an optical readout performed by a laser diode operating as an injection interferometer. An analysis of the system, validated by preliminary experimental results, indicates an attainable performance of 1 deg/h√Hz

Published in:

Electronics Letters  (Volume:37 ,  Issue: 12 )