Transmission line pulsing (TLP) is a useful technique to characterize electrostatic discharge (ESD) events in semiconductor devices. The pulse waveforms generated by a typical TLP set-up, however, are often distorted and oscillatory. In this paper, a new and simple experimental set-up is developed to improve the shape of the TLP waveforms and thus to increase the effectiveness of the TLP technique. Experimental results obtained from the conventional and improved set-ups are presented and compared
Published in:
Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
Date of Conference: 2001