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An improved transmission line pulsing (TLP) setup for electrostatic discharge (ESD) testing in semiconductor devices and ICs

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5 Author(s)
Lee, J.C. ; RF/Analog SiGe BiCMOS Device Modeling Group, IBM Corp., Burlington, VT, USA ; Young, R. ; Liou, J.J. ; Croft, G.D.
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Transmission line pulsing (TLP) is a useful technique to characterize electrostatic discharge (ESD) events in semiconductor devices. The pulse waveforms generated by a typical TLP set-up, however, are often distorted and oscillatory. In this paper, a new and simple experimental set-up is developed to improve the shape of the TLP waveforms and thus to increase the effectiveness of the TLP technique. Experimental results obtained from the conventional and improved set-ups are presented and compared

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Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on

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