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Preparation of superconducting Bi-Ca-Sr-Cu-O thin films by RF magnetron sputtering

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3 Author(s)
Yang, YiFeng ; Wisconsin Univ., Madison, WI, USA ; Dieckmann, G.H. ; Nordman, J.E.

Superconducting thin films of Bi-Ca-Sr-Cu oxide, with T c onset of approximately 90 K were prepared by RF magnetron sputtering on sapphire with and without a CaZrO3 buffer layer, on ZrO-coated silicon (111), and on single-crystal MgO (100). The as-deposited films were amorphous insulators which were then annealed in various ways. Zero resistance at 72 K for films on (100) MgO was achieved after annealing in air at 810°C for 2 h. However, the X-ray diffraction pattern showed that two superconducting phases, i.e., Bi2CaSr2Cu2O8+x (2122) and Bi2CaxSr2-xCuO6+y (2021), are present, and that films have preferred orientation with c-axis normal to the substrates

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Magnetics, IEEE Transactions on  (Volume:25 ,  Issue: 2 )