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Efficient killer-defect control using reliable high-throughput SEM-ADC

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6 Author(s)
Watanabe, K. ; Semicond. Manuf. Technol. Div., Hitachi Ltd., Ibaraki, Japan ; Takagi, Y. ; Obara, K. ; Okuda, H.
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An efficient killer-defect control method using a reliable high throughput scanning electron microscope and automatic defect classification (ADC) is described. The concept of ADC system-class is used to facilitate recipe set-up (defect imageless tuning). Experiments demonstrated that the performance of this method exceeds that specified by the International Technology Roadmap for Semiconductors. This method is applicable to both application-specific IC and system-on-chip production lines

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Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI

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