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A thin-film waveguide photodetector using hydrogenated amorphous silicon

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2 Author(s)
Howerton, Marta McWright ; Dept. of Electr. Eng., Virginia Univ., Charlottesville, VA, USA ; Batchman, Ted E.

Metal-silicon-metal cladding layers on dielectric waveguides exhibit coupling and absorption characteristics that make them useful as photodetectors for integrated optical applications. Multilayer computer-modeling techniques were applied to waveguide photodetectors in order to investigate field and power distributions, as well as the attenuation and phase response in the guiding region. A waveguide photodetector based on amorphous silicon was fabricated and demonstrated

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Lightwave Technology, Journal of  (Volume:6 ,  Issue: 12 )