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Novel dual-axis SOI micromachined inertial sensors with optical sensing: design and fabrication

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4 Author(s)
Bochobza-Degani, O. ; Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel ; Seter, D.J. ; Socher, E. ; Nemirovsky, Y.

A new design of micromachined inertial sensors, accelerometer and rate-gyroscope, is presented. The design employs the modulated integrative differential optical sensing for the output motion sensing. The former uni-axial design with cantilever suspension is presented. Then the new dual-axis design with “spider” suspensions is discussed. The design and fabrication issues of the new design are discussed, in-light of the results of the uni-axial design. The predicted performance of this device is presented

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Electrical and electronic engineers in israel, 2000. the 21st ieee convention of the

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