The silicon detectors of nuclear radiation are produced by ion implantation. The comparison of the characteristics of detectors conducted by various ways and with use of different modes was carried out. It was shown that with use of optimum modes of manufacturing the detectors have good energy resolution. It was shown also, that the produced structures can work as photocells in pairs with scintillators
Published in:
Ion Implantation Technology, 2000. Conference on
Date of Conference: 2000