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Full three-dimensional motion characterization of a gimballed electrostatic microactuator

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4 Author(s)
Rembe, C. ; Berkeley Sensor & Acuator Center, California Univ., Berkeley, CA, USA ; Muller, L. ; Muller, R.S. ; Howe, R.T.

Advanced testing methods for the dynamics of microdevices are necessary to develop reliable marketable microelectromechanical systems (MEMS). The main purpose for MEMS testing is to provide feedback to the design-and-simulation process in an engineering development effort. This feedback should include device behavior, system parameters, and material properties. An essential part of more effective microdevice development is high-speed visualization of the dynamics of MEMS structures. We have developed and employed a full three-dimensional-motion-characterization system for MEMS to observe the response of a gimballed microactuator, a multi-degree-of-freedom microdevice

Published in:

Reliability Physics Symposium, 2001. Proceedings. 39th Annual. 2001 IEEE International

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