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Miniature silicon micromachined ultrasonic point detectors for measurement of airborne radiated fields

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5 Author(s)
R. A. Noble ; Defence Evaluation Res. Agency, Great Malvern, UK ; T. J. Robertson ; J. S. McIntosh ; D. A. Hutchins
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Micromachining offers the ability to fabricate large numbers of miniature, near identical capacitive ultrasonic point detectors. Such point detectors have been fabricated using low-temperature silicon micromachining techniques, ranging in size from 100 μm to 5 mm square. Their sensitivity and angular response have been measured, and it is demonstrated that they can operate at frequencies in excess of 2 MHz, where attenuation in air becomes excessive, with an omni-directional response. Results from scanning the fields of air-coupled ultrasonic transducers will be presented, as will their use in arrays

Published in:

Ultrasonics Symposium, 2000 IEEE  (Volume:1 )

Date of Conference:

Oct 2000