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Micromachined piezoelectric ultrasonic transducers based on parylene diaphragm in silicon substrate

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2 Author(s)
Cheol-Hyun Han ; Dept. of Electr. Eng., Hawaii Univ., Honolulu, HI, USA ; Eun Sok Kim

This paper describes the fabrication and characterization of a micromachined ultrasonic airborne transducer built on a 1 μm thick parylene polymer diaphragm (flat 5000*5000 μm2 square diaphragm) with electrodes and a piezoelectric ZnO film in a silicon substrate. The sound pressure level at 20 mm away from the fabricated transducer is measured to be around 0.44 Pa at 32.9 kHz (the transducer is driven by a 11 Vrms sinusoidal source and measured with B&K 4135 microphone). The vibration amplitude is measured (with a laser Doppler meter) to be about 1 μm at 32.9 kHz. Finite element analysis with ANSYS 5.6 has been performed to analyze the static and dynamic behaviors of the transducer under both pressure and voltage loadings

Published in:

Ultrasonics Symposium, 2000 IEEE  (Volume:1 )

Date of Conference:

Oct 2000