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Travelling wave ultrasonic motor using the B/sub 08/ flexural mode of a circular membrane

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2 Author(s)
P. J. Rayner ; Sch. of Ind. & Manuf. Sci., Cranfield Univ., Beds, UK ; R. W. Whatmore

This paper describes the design, construction, and performance of a piezoelectric motor that uses the travelling B/sub 08/ mode of an 80-mm diameter circular membrane to drive a rotor by frictional contact. The motor is of a thin planar design, giving high torque of up to 0.33 Nm at low speed and has been developed as a design that can be made with lithographic techniques for miniaturization. Investigations of the free stator with a vibration pattern imager and impedance analyser gave the resonance frequency, mode, and electromechanical coupling of the stator. Motor speed as a function of frequency for a constant voltage and performance charts of speed, output power, and efficiency against torque are presented for a particular input voltage and rotor pre-load. The effects of two different lead zirconate titanate (PZT) ring dimensions have been investigated. Excitation of the B/sub 09/ mode has been observed, incommensurate with the piezoelectric excitation of the stator. This is discussed with relation to edge-clamping of the stator. Single standing wave motoring was observed, believed to arise from asymmetry of the stator and its perturbation of the B/sub 08/ resonance mode. Sources of power loss, including frame vibration and friction interface slip, are considered and discussed.

Published in:

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:48 ,  Issue: 3 )