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Development of sub-micron SNS ramp-type Josephson junctions

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5 Author(s)
Hagedorn, D. ; Phys. Tech. Bundesanstalt, Braunschweig, Germany ; Dolata, R. ; Popel, R. ; Buchholz, F.-I.
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At PTB, a fabrication technology for sub-micron superconductor-normal metal-superconductor (SNS) ramp-type Josephson junctions has been developed which allows these junctions to be used as active elements in highly integrated circuits. Test circuits of series arrays containing up to 10000 junctions with contact areas below 0.4 μm2 and of single junctions with contact areas reduced down to 0.03 μm2 have been successfully realized and measured. To achieve high values of the characteristic voltage Vc , different N-layer materials, i.e. Al, PdAu and HfTi with thicknesses down to d=15 nm and different layer sequences have been investigated. Typical parameters of SNS junctions with a thickness of the HfTi N-layer of d=20nm are about jc=470 kA/cm2 and Vc=100 μV. The junctions realized allow for application in superconducting circuits

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Applied Superconductivity, IEEE Transactions on  (Volume:11 ,  Issue: 1 )