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Fabrication of ultra-small and long intrinsic Josephson junctions on Bi-2212 single crystal whiskers

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4 Author(s)
Sang-Jae Kim ; Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan ; Y. I. Latyshev ; T. Yamashita ; S. Kishida

We report successful fabrication of small and long intrinsic Josephson junctions (IJJs) using Bi-2212 single crystal whiskers. The stacks of IJJs were made by 3-D focused-ion-beam (FIB) etching method. First a microbridge was patterned in a required junction width by etching into the substrate normal direction. By tilting the sample stage up to 90°, two grooves on the bridge were, then, etched from the lateral direction in order to create the required junction size. For in-plane area of 0.01 μm2, Bi-2212 stacks showed no critical current. We also fabricated 3-D IJJs consisting of small and long stacks on the same chip

Published in:

IEEE Transactions on Applied Superconductivity  (Volume:11 ,  Issue: 1 )