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We are developing high performance X-ray detectors based on superconducting transition-edge sensors (TES) for application in materials analysis and astronomy. Using our recently developed fully lithographic TES fabrication process, we have made devices with an energy resolution of 4.5±0.1 eV for 5.9 keV X-rays, the best reported energy resolution for any energy dispersive detectors in this energy range. These detectors utilize micromachined thermal isolation structures and transition-edge sensors fabricated from Mo/Cu bilayers with normal-metal boundary conditions. We have found the normal-metal boundary conditions to be critical to stable and reproducible low noise operation. In this paper we present details of fabrication and performance of these devices
Published in:
Applied Superconductivity, IEEE Transactions on
(Volume:11
,
Issue:
1
)
Date of Publication: Mar 2001
- Page(s):
- 739 - 742
- ISSN :
- 1051-8223
- INSPEC Accession Number:
- 6948799
- Digital Object Identifier :
- 10.1109/77.919451
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 August 2002
- Issue Date :
- Mar 2001
- Sponsored by :
- The IEEE Council on Superconductivity
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