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Microfabricated transition-edge X-ray detectors

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8 Author(s)
Hilton, G.C. ; Nat. Inst. of Stand. & Technol., Boulder, CO, USA ; Martinis, John M. ; Irwin, K.D. ; Bergren, N.F.
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We are developing high performance X-ray detectors based on superconducting transition-edge sensors (TES) for application in materials analysis and astronomy. Using our recently developed fully lithographic TES fabrication process, we have made devices with an energy resolution of 4.5±0.1 eV for 5.9 keV X-rays, the best reported energy resolution for any energy dispersive detectors in this energy range. These detectors utilize micromachined thermal isolation structures and transition-edge sensors fabricated from Mo/Cu bilayers with normal-metal boundary conditions. We have found the normal-metal boundary conditions to be critical to stable and reproducible low noise operation. In this paper we present details of fabrication and performance of these devices

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Applied Superconductivity, IEEE Transactions on  (Volume:11 ,  Issue: 1 )