Cart (Loading....) | Create Account
Close category search window

Fabrication of SIS junctions for space borne submillimeter wave mixers using negative resist e-beam lithography

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Peron, I. ; DEMIRM, Obs. de Paris, Meudon, France ; Pasturel, P. ; Schuster, K.-F..

We report on the development of a new process for the fabrication of Nb/Al-AlOx/Nb tunnel junctions for channel 1 (480-640 GHz) Superconductor-Insulator-Superconductor (SIS) mixers of HIFI, the Heterodyne Instrument for FIRST (Far InfraRed & Submillimeter Telescope). The process is derived from a standard self-aligned lift-off process but uses negative resist electron beam lithography (EBL) for junction definition. The junction area is tightly controlled down to below 1 μm2 without the complexity of processes using positive electron beam resists. We describe process parameters and experimental results: DC-tests and Fourier Transform Spectrometer (FTS) measurements

Published in:

Applied Superconductivity, IEEE Transactions on  (Volume:11 ,  Issue: 1 )

Date of Publication:

Mar 2001

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.