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Frequency dividers and FET test structures have been fabricated on selectively doped n+AlGaAs/GaAs heterostructure FETs (HFETs) with 0.5 mu m gate length electron-beam direct-writing on a novel trilevel resist, EBR-9/Ge/PMGI. A divide-by-two master-slave frequency divider fabricated with direct-coupled FET logic gates operated up to 9.3 GHz. The input frequency range of a divide-by-two transmission-gate frequency divider was from 3.2 to 12.2 GHz, with a supply voltage of 1.2 V at room temperature. The average propagation delay (fan-in and fan-out=1) was 18.2 ps/gate, with a power dissipation of 3.9 mW/stage. With a 3.5 mu m source-drain spacing, a peak transconductance of 360 mS/mm was measured. The functional yield of both discrete devices and circuits was 92% across 2 in-diameter wafers.