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Getters: micromolecular scavengers for packaging [MEMS]

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2 Author(s)
Previti, M. ; Cookson Semicond. Packaging Mater., USA ; Gilleo, K.

MEMS has become a very high profile technology during the past year, but there are a host of issues that require economical technical solutions. Getters will play a key role in MEMS and MOEMS packaging. Dual-purpose moisture-particle getters appear ideal and are already used in some optical MEMS commercial products. More work must be done in this area, especially for quasi-hermetic packaging. A getter may enable lower cost packaging such as adhesive sealing or even plastic packaging

Published in:

Advanced Packaging Materials: Processes, Properties and Interfaces, 2001. Proceedings. International Symposium on

Date of Conference:

2001

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