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Membrane-supported CPW with mounted active devices

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3 Author(s)
Liu, W.Y. ; Sch. of Electr. & Comput. Eng., Leeds Univ., UK ; Steenson, D.P. ; Steer, M.B.

This paper reports the fabrication of printed circuit lines on a 5 /spl mu/m thick membrane that minimizes dielectric loss and effectively eliminates surface modes, both of which are important for operation at millimeter-wave and submillimeter-wave frequencies. The relatively low-cost low-temperature process uses a photosensitive resin (SU-8) to form the membrane and enables devices to be mounted on it.

Published in:

Microwave and Wireless Components Letters, IEEE  (Volume:11 ,  Issue: 4 )

Date of Publication:

April 2001

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