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MEMS microswitches for reconfigurable microwave circuitry

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8 Author(s)
Duffy, S. ; Lincoln Lab., MIT, Lexington, MA, USA ; Bozler, Carl ; Rabe, Steven ; Knecht, J.
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The performance is reported for a new microelectromechanical structure (MEMS) cantilever microswitch. We report on both dc- and capacitively-contacted microswitches. The dc-contacted microswitches have contact resistance of less than 1 /spl Omega/, and the RF loss of the switch up to 40 GHz in the closed position is 0.1-0.2 dB. Capacitively-contacted switches have an impedance ratio of 141:1 from the open to closed state and in the closed position have a series capacitance of 1.2 pF. The capacitively-contacted switches have been measured up to 40 GHz with S/sub 22/ less than -0.7 dB across the 5-40 GHz band.

Published in:

Microwave and Wireless Components Letters, IEEE  (Volume:11 ,  Issue: 3 )