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Fabrication of metallic heat exchangers using sacrificial polymer mandrils

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5 Author(s)
Arias, F. ; Dept. of Chem., Harvard Univ., Cambridge, MA, USA ; Oliver, S.R.J. ; Xu, B. ; Holmlin, R.E.
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This paper demonstrates the use of poly(dimethylsiloxane) (PDMS), polyurethane (PU), epoxy, and poly(methyl methacrylate) (PMMA) as mandrils to fabricate metallic heat exchangers having 300-700 μm internal channels. The mandrils were prepared using two soft lithographic techniques-replica molding and microembossing. To fabricate the heat exchangers, the polymeric mandrils were coated with a thin layer of metal by thermal evaporation or sputtering; this layer acted as the cathode for electrodeposition of a shell of nickel or copper that was 100 μm thick. The polymers were removed by burning them out at 400°C in air, or by dissolving them with a tetrahydrofuran solution of tetrabutylammonium fluoride. Studies of heat dissipation showed that the nickel heat exchangers with features that range in size from 150-750 μm have thermal resistances ranging from 0.07 to 0.12°-2 C W-1 cm at flow rates of water of ~20 L h-1 and pressures of 8.6-83×103 N m-2

Published in:

Microelectromechanical Systems, Journal of  (Volume:10 ,  Issue: 1 )

Date of Publication:

Mar 2001

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