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Application of bi-directional thin-film micro wire array to RF integrated spiral inductors

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7 Author(s)
Yamaguchi, M. ; Inst. of Electr. & Commun. Eng., Tohoku Univ., Sendai, Japan ; Suezawa, K. ; Baba, M. ; Arai, K.I.
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Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space=9 μm/2 μm, an RF integrated inductor exhibited L=7.5 nH(+11% of air core's), R=7.6 Ω and Q=6.3 (almost same as the air core's)

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Magnetics, IEEE Transactions on  (Volume:36 ,  Issue: 5 )