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Magnetic properties of NdFeB thin film obtained by diffusion annealing

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7 Author(s)
Mhan-joong Kim ; Korea Res. Inst. of Stand. & Sci., Taejon, South Korea ; Ying Li ; Yoon-bae Kim ; Kwon-sang Ryu
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The magnetic properties and microstructure of diffusion annealed [Ta/Nd/NdFeB/Nd/Ta] thin films have been investigated. The NdFeB films were deposited on Si substrates by the magnetron sputtering method. The high coercivity NdFeB films were obtained by diffusion of Nd/NdFeB layers into films at 620°C for 10 minutes. The films with the thickness ratio of Nd/NdFeB ⩾1 show good hard magnetic properties with high coercivity of about 20 kOe

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Magnetics, IEEE Transactions on  (Volume:36 ,  Issue: 5 )