PZT crack detection in suspension-based dual stage actuator [for HDDs]

An impedance method is proposed to detect cracks of PZT bars in suspension based dual stage-actuators. The frequency response amplitude of impedance at the resonance of 1.95 MHz, the PZT bar width extension mode, was very sensitive to the cracks in PZT material. As cracks in the PZT bars propagated from invisible micro cracks to visible macro cracks, the impedance gain at 1.95 MHz dropped suddenly.