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Novel applications of thermally controlled microbubble driving system

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5 Author(s)
Takahashi, K. ; Dept. of Aeronaut. & Astronaut., Kyushu Univ., Fukuoka, Japan ; Yoshino, K. ; Hatano, S. ; Nagayama, K.
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Novel applications of microbubble migration controlled by microheaters are proposed and demonstrated. One is a liquid-film-type motor/conveyer. Vapor or gas bubbles in the cavities on rotor are driven based on Marangoni effect caused by the microheaters on stator. The other is a "valve-less" valve, which is made of in-line microheaters at an intersection of microchannels, where a microbubble moves according to the thermocapillary force and shuts-off liquid flow due to its surface hardness with no mechanical part. With the developments of these new devices, the mechanisms of heat transfer and fluid motion around the microbubble are discussed.

Published in:

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Date of Conference:

25-25 Jan. 2001